Lephaka le ts'oarang letsohoke sesebelisoa sa bohlokoa se sebelisoang ts'ebetsong ea tlhahiso ea semiconductor ho sebetsana, ho fetisa le ho beha maemoliphaphatha. Hangata e na le letsoho la robotiki, gripper le sistimi ea taolo, e nang le bokhoni bo nepahetseng ba ho sisinyeha le ho beha maemo.Liphaka tse tšoarang matsoholi sebelisoa haholo lihokelong tse fapaneng tsa tlhahiso ea semiconductor, ho kenyeletsoa mehato ea ts'ebetso joalo ka ho kenya li-wafer, ho hloekisa, ho beha filimi e tšesaane, etching, lithography le tlhahlobo. Bokhoni ba eona bo nepahetseng, bo ts'epahalang le bo ikemetseng bo bohlokoa ho netefatsa boleng, katleho le botsitso ba ts'ebetso ea tlhahiso.
Mesebetsi e ka sehloohong ea letsoho la ho tšoara sephaephe e kenyelletsa:
1. Ho fetisoa ha Wafer: Letsoho le tšoarang sephaphatha le khona ho fetisetsa ka nepo li-wafers ho tloha sebakeng se seng ho ea ho se seng, joalo ka ho nka li-wafers ho tloha sebakeng sa polokelo le ho li beha ka sesebelisoa sa ho sebetsa.
2. Position and orientation: Letsoho le tšoarang sephaphatha le khona ho beha ka nepo le ho tsamaisa sephaphatha ho etsa bonnete ba ho lumellana le boemo bo nepahetseng bakeng sa ts'ebetso e latelang kapa ts'ebetso ea ho lekanya.
3. Ho tlamella le ho lokolla: Matsoho a tšoarang liphaephe hangata a na le li-grippers tse ka khonang ho koala li-wafers ka mokhoa o sireletsehileng le ho li lokolla ha ho hlokahala ho etsa bonnete ba hore li-wafers li tsamaisoa ka mokhoa o sireletsehileng.
4. Taolo ea boiketsetso: Letsoho le ts'oaroang ka sephaphatha le na le sistimi e tsoetseng pele ea taolo e ka khonang ho etsa tatellano e reriloeng esale pele, ho ntlafatsa katleho ea tlhahiso le ho fokotsa liphoso tsa batho.
Litšobotsi le melemo
1.Litekanyo tse nepahetseng le botsitso ba mocheso.
2.Ho tiea ho khethehileng le ho ts'oana hantle ha mocheso, tšebeliso ea nako e telele ha e bonolo ho koba deformation.
3.E na le sebaka se boreleli le ho hanyetsa ho apara hantle, kahoo ho tšoara chip ka mokhoa o sireletsehileng ntle le tšilafalo ea likaroloana.
4.Silicon carbide resistivity in 106-108Ω, non-magnetic, tumellanong le litlhoko tsa litlhaloso tsa anti-ESD; E ka thibela ho bokellana ha motlakase o tsitsitseng holim'a chip.
5.Good conductivity ea mocheso, coefficient e tlaase ea ho atolosa.
