AlN Heater ka semicera ke tharollo e tsoetseng pele ea ho futhumatsa e entsoeng ka aluminium nitride ceramic, e etselitsoeng lits'ebetso tse sebetsang hantle liindastering tse kang li-semiconductors, vacuum systems le tse ling. Mocheso ona oa mocheso o ikhethang le mohatsela oa motlakase o etsa hore e be sebaka se loketseng bakeng sa ho futhumatsa ka nepo libakeng tse batloang haholo joalo ka li-wafer processing, vacuum evaporators le mechini e fafatsang metsi.
Ho semicera, re motlotlo ka ho fana ka lihlahisoa tsa boemo bo holimo tse fihlelang litlhoko tsa indasteri, 'me AlN Heater le eona e joalo. E entsoe ka aluminium nitride (AlN), heater ena e fana ka khanyetso e ntle ea mocheso, katoloso e tlase ea mocheso, le bokhoni ba ho mamella mocheso o feteletseng ntle le ho senya ts'ebetso. Kabo ea eona ea mocheso e sebetsang hantle e e etsa hore e tšoanelehe bakeng sa lits'ebetso tse mahlonoko tse kang k'hemik'hale ea mouoane oa lik'hemik'hale (CVD) le lisebelisoa tse ling tse tšesaane tsa filimi.
Ho feta moo, AlN Heater e nepahetse bakeng sa ho kopanngoa le licheso tse futhumala le li-vacuum evaporator, e leng se etsang hore e be tharollo e fapaneng bakeng sa bahlahisi ba itšetlehileng ka lisebelisoa tse futhumatsang tse sa fetoheng, tsa boleng bo holimo. Ka machining a aluminium nitride le nitride e nepahetseng ea kaho ea aluminium, hitara e hahiloe bakeng sa ts'epo ea nako e telele le taolo e nepahetseng ea ho futhumatsa.
Haeba u batla AlN aluminium nitride tharollo e ipabolang ka ho tšoarella le ho sebetsa hantle, semicera e fana ka khetho e tšepahalang ho AlN Heater. Sefuthumatsi sena se tsoetseng pele sa ceramic se tšehetsa mahlale a morao-rao lits'ebetsong tsa CVD, sputtering, le lits'ebetso tse ling tsa semiconductor, ho thusa ho boloka ts'ebetso ea ts'ebetso maemong a mocheso o phahameng.
