Blue/green LED epitaxy ho tloha semicera e fana ka litharollo tsa morao-rao bakeng sa tlhahiso e phahameng ea ts'ebetso ea LED. E etselitsoe ho ts'ehetsa mekhoa e tsoetseng pele ea kholo ea epitaxial, thekenoloji ea semicera's Blue/green LED epitaxy e ntlafatsa katleho le ho nepahala ha ho hlahisa li-LED tse putsoa le tse tala, tse bohlokoa bakeng sa lisebelisoa tse fapaneng tsa optoelectronic. Ho sebelisa Si Epitaxy ea morao-rao le SiC Epitaxy, tharollo ena e tiisa boleng bo botle le ho tšoarella.
Ts'ebetsong ea tlhahiso, MOCVD Susceptor e bapala karolo ea bohlokoa, hammoho le likarolo tse kang PSS Etching Carrier, ICP Etching Carrier, le RTP Carrier, e ntlafatsang tikoloho ea kholo ea epitaxial. Semicera's Blue / Green LED epitaxy e etselitsoe ho fana ka tšehetso e tsitsitseng bakeng sa LED Epitaxial Susceptor, Barrel Susceptor, le Monocrystalline Silicon, ho netefatsa tlhahiso ea liphetho tse tsitsitseng, tsa boleng bo phahameng.
Ts'ebetso ena ea epitaxy e bohlokoa bakeng sa ho theha Likarolo tsa Photovoltaic mme e ts'ehetsa lits'ebetso tse joalo ka GaN ho SiC Epitaxy, ho ntlafatsa katleho ea semiconductor ka kakaretso. Ho sa tsotellehe hore na ke tlhophiso ea Pancake Susceptor kapa e sebelisoa ho li-setups tse ling tse tsoetseng pele, tharollo ea epitaxy ea semicera ea Blue / green LED e fana ka ts'ebetso e tšepahalang, e thusang bahlahisi ho finyella tlhokahalo e ntseng e eketseha ea lisebelisoa tsa boleng bo phahameng ba LED.
Lintlha tse ka sehloohong:
1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng : bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.
Lintlha tse ka Sehloohong tsaCVD-SIC Coating
| SiC-CVD Properties | ||
| Sebopeho sa Crystal | FCC mohato oa β | |
| Botenya | g/cm³ | 3.21 |
| Ho thatafala | Vickers thata | 2500 |
| Boholo ba lijo-thollo | μm | 2~10 |
| Bohloeki ba Lik'hemik'hale | % | 99.99995 |
| Matla a Mocheso | J·kg-1 ·K-1 | 640 |
| Sublimation Mocheso | ℃ | 2700 |
| Felexural Matla | MPa (RT 4-point) | 415 |
| Modulus e monyane | Gpa (4pt bend, 1300 ℃) | 430 |
| Katoloso ea Thermal (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
