Semiceraka boikakaso e hlahisa sekgala sa yonaEpitaxy ea GaNlits'ebeletso, tse etselitsoeng ho fihlela litlhoko tse lulang li fetoha tsa indasteri ea semiconductor. Gallium nitride (GaN) ke thepa e tsebahalang ka thepa ea eona e ikhethang, 'me lits'ebetso tsa rona tsa kholo ea epitaxial li netefatsa hore melemo ena e fumaneha ka botlalo lisebelisoa tsa hau.
Li-Layers tsa GaN tsa Ts'ebetso e Phahameng Semicerae ikhethang ka tlhahiso ea boleng bo holimoEpitaxy ea GaNmeaho, e fanang ka bohloeki bo ke keng ba lekanngoa ba lintho tse bonahalang le botšepehi ba sebopeho. Likarolo tsena li bohlokoa bakeng sa lits'ebetso tse fapaneng, ho tloha ho matla a elektroniki ho ea ho optoelectronics, moo ts'ebetso e phahameng le ts'epo e hlokahalang. Mekhoa ea rona ea ho hola e nepahetseng e netefatsa hore sekhahla se seng le se seng sa GaN se kopana le litekanyetso tse hlokahalang bakeng sa lisebelisoa tse tsoetseng pele.
Optimized for SebetsaTheEpitaxy ea GaNe fanoeng ke Semicera e etselitsoe ho ntlafatsa ts'ebetso ea likarolo tsa hau tsa elektroniki. Ka ho fana ka likarolo tsa GaN tse nang le sekoli se tlase, tse hloekileng haholo, re nolofalletsa lisebelisoa hore li sebetse ka maqhubu a phahameng le li-voltage, ka tahlehelo ea matla e fokotsehileng. Ntlafatso ena ke senotlolo bakeng sa lits'ebetso tse joalo ka li-high-electron-mobility transistors (HEMTs) le light-emitting diode (LED), moo ho sebetsa hantle ho leng bohlokoa haholo.
Monyetla oa ho Sebelisa Melemo Semicera'sEpitaxy ea GaNe sebetsa ka mefuta-futa, e sebetsana le mefuta e mengata e fapaneng ea liindasteri le lisebelisoa. Hore na o etsa liamplifiers tsa motlakase, likarolo tsa RF, kapa li-laser diode, likarolo tsa rona tsa epitaxial tsa GaN li fana ka motheo o hlokahalang bakeng sa lisebelisoa tse sebetsang hantle, tse tšepahalang. Ts'ebetso ea rona e ka hlophisoa ho fihlela litlhoko tse ikhethileng, ho netefatsa hore lihlahisoa tsa hau li fumana litholoana tse nepahetseng.
Boitlamo ho BolengBoleng ke lejoe la motheo laSemicera's katamelo hoEpitaxy ea GaN. Re sebelisa mahlale a tsoetseng pele a kholo ea epitaxial le mehato e matla ea taolo ea boleng ho hlahisa likarolo tsa GaN tse bonts'ang ho ts'oana ho hoholo, bofokoli bo tlase, le thepa ea boleng bo holimo. Boitlamo bona ba boleng bo netefatsa hore lisebelisoa tsa hau ha li kopane feela empa li feta maemo a indasteri.
Mekhoa e Mecha ea Kholiso Semicerae ka pele-pele ho boqapi lefapheng laEpitaxy ea GaN. Sehlopha sa rona se tsoela pele ho hlahloba mekhoa le mahlale a macha ho ntlafatsa ts'ebetso ea kholo, ho fana ka likarolo tsa GaN tse nang le litšobotsi tse ntlafalitsoeng tsa motlakase le mocheso. Litlhahiso tsena li fetolela ho lisebelisoa tse sebetsang hantle, tse khonang ho finyella litlhoko tsa lits'ebetso tsa moloko o latelang.
Customized Solutions for Your ProjectsKa ho hlokomela hore morero o mong le o mong o na le litlhoko tse ikhethang,Semicerae fana ka customizedEpitaxy ea GaNtharollo. Hore na o hloka li-profiles tse khethehileng tsa doping, botenya ba lera, kapa liphetho tse holimo, re sebetsa haufi-ufi le uena ho nts'etsapele mokhoa o khotsofatsang litlhoko tsa hau hantle. Sepheo sa rona ke ho u fa likarolo tsa GaN tse entsoeng ka nepo ho ts'ehetsa ts'ebetso le ts'epahalo ea sesebelisoa sa hau.
| Lintho | Tlhahiso | Patlisiso | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Phoso ea ho shebana le bokaholimo | <11-20>4±0.15° | ||
| Litekanyetso tsa Motlakase | |||
| Dopant | n-mofuta oa Nitrojene | ||
| Ho hanyetsa | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Diameter | 150.0±0.2mm | ||
| Botenya | 350±25 μm | ||
| Boemo ba mantlha bo bataletseng | [1-100]±5° | ||
| Bolelele ba pele bo bataletseng | 47.5±1.5mm | ||
| Folete ea bobeli | Ha ho letho | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Inamela | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Sebopeho | |||
| Boima ba micropipe | <1 e/cm2 | <10 e/cm2 | <15 e/cm2 |
| Litšila tsa tšepe | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Boleng ba Pele | |||
| Pele | Si | ||
| Qetello ea bokaholimo | Si-face CMP | ||
| Likaroloana | ≤60ea/wafer (boholo ≥0.3μm) | NA | |
| Mengwapo | ≤5ea/mm. Bolelele ba kakaretso ≤Diameter | Bolelele bo akaretsang≤2*Diameter | NA |
| Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso | Ha ho letho | NA | |
| Li-edge chips/indents/fracture/hex plates | Ha ho letho | ||
| Libaka tsa polytype | Ha ho letho | Kakaretso≤20% | Kakaretso≤30% |
| Ho tšoaea ka laser ka pele | Ha ho letho | ||
| Boleng ba Morao | |||
| Qetello ea morao | C-sefahleho sa CMP | ||
| Mengwapo | ≤5ea/mm, bolelele bo akaretsang≤2* bophara | NA | |
| Litšitiso tse ka morao (li-chips / indents) | Ha ho letho | ||
| Bokhopo ba mokokotlo | Ra≤0.2nm (5μm*5μm) | ||
| Ho tšoaea ka morao laser | 1 mm (ho tloha pheletsong e ka holimo) | ||
| Qetello | |||
| Qetello | Chamfer | ||
| Sephutheloana | |||
| Sephutheloana | Epi e loketse ho paka ka vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata | ||
| *Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD. | |||
