Semicera e fana ka tloaelo ea boleng bo holimosilicon carbide cantilever paddlese etselitsoe ho phahamisa lits'ebetso tsa tlhahiso ea semiconductor. MoqapiSekepe sa SiCmoralo o netefatsa ho tšoarella ho ikhethang le ho hanyetsa mocheso o phahameng, e leng se etsang hore e be karolo ea bohlokoa bakeng sa ho sebetsana le li-wafer maemong a thata a mocheso o phahameng.
TheSeketsoana sa silicon carbidee hahiloe ho mamella lipotoloho tse feteletseng tsa mocheso ha e ntse e boloka botsitso ba sebopeho, e netefatsa lipalangoang tse tšepahalang tsa semiconductor nakong ea mekhahlelo e mahlonoko ea tlhahiso ea semiconductor. Ka matla a phahameng a mochine, senasekepe sa mapheoanae fokotsa kotsi ea tšenyo ea li-wafers, e lebisang ho chai e phahameng le boleng bo tsitsitseng ba tlhahiso.
E 'ngoe ea lintlafatso tsa bohlokoa ho Semicera's SiC paddle e ka har'a likhetho tsa eona tsa moralo. E etselitsoe ho fihlela litlhoko tse khethehileng tsa tlhahiso, paddle e fana ka maemo a bonolo ho kopanngoa le lisebelisoa tse fapaneng tsa lisebelisoa, e leng se etsang hore e be tharollo e nepahetseng bakeng sa mekhoa ea morao-rao ea masela. Mohaho o bobebe empa o le matla o thusa ho sebetsana habonolo le ho fokotsa nako ea ts'ebetso, e tlatsetsang ntlafatsong ea tlhahiso ea semiconductor.
Ho phaella ho thepa ea eona ea mocheso le ea mechine, eSeketsoana sa silicon carbidee fana ka khanyetso e ntle ea lik'hemik'hale, e e lumellang hore e sebetse ka mokhoa o ts'epahalang le maemong a thata a lik'hemik'hale. Sena se etsa hore se lokele ho sebelisoa lits'ebetsong tse kenyelletsang etching, deposition, le kalafo ea mocheso o phahameng, moo ho boloka bots'epehi ba seketsoana sa wafer ho leng bohlokoa bakeng sa ho netefatsa liphetho tsa boleng bo holimo.
Thepa ea 'mele ea Recrystallized Silicon Carbide | |
Thepa | Boleng bo Tlwaelehileng |
Mocheso oa ho sebetsa (°C) | 1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho) |
Likahare tsa SiC | 99.96% |
Free Si content | <0.1% |
Boima ba bongata | 2.60-2.70 g/cm3 |
porosity e bonahalang | <16% |
Matla a ho hatella | > 600 MPa |
Matla a ho kobeha a batang | 80-90 MPa (20°C) |
Matla a ho kobeha a chesang | 90-100 MPa (1400°C) |
Katoloso ea mocheso @1500°C | 4.70 10-6/°C |
Thermal conductivity @1200°C | 23 W/m•K |
Elastic modulus | 240 GPA |
Ho hanyetsa mocheso oa mocheso | E ntle haholo |