Paddle ea boleng bo holimo ea silicon carbide cantilever

Tlhaloso e Khutšoanyane:

Semicera Semiconductor Technology Co., Ltd. ke morekisi ea ka sehloohong ea sebetsanang le li-wafer le lisebelisoa tse tsoetseng pele tsa semiconductor.Re inehetse ho fana ka lihlahisoa tsa boleng bo holimo, tse tšepahalang le tse ncha ho tlhahiso ea semiconductor,indasteri ea photovoltaicle mafapha a mang a amanang.

Mohala oa rona oa lihlahisoa o kenyelletsa lihlahisoa tsa graphite tse koahetsoeng ke SiC / TaC le lihlahisoa tsa ceramic, tse kenyelletsang lisebelisoa tse fapaneng tse kang silicon carbide, silicon nitride, le aluminium oxide joalo-joalo.

Joaloka mofani oa thepa ea tšepahalang, re utloisisa bohlokoa ba thepa e ka sebelisoang ha ho etsoa tlhahiso, 'me re ikemiselitse ho fana ka lihlahisoa tse finyellang litekanyetso tsa boleng bo holimo ho phethahatsa litlhoko tsa bareki ba rona.

 

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Semicera e fana ka tloaelo ea boleng bo holimosilicon carbide cantilever paddlese etselitsoe ho phahamisa lits'ebetso tsa tlhahiso ea semiconductor. MoqapiSekepe sa SiCmoralo o netefatsa ho tšoarella ho ikhethang le ho hanyetsa mocheso o phahameng, e leng se etsang hore e be karolo ea bohlokoa bakeng sa ho sebetsana le li-wafer maemong a thata a mocheso o phahameng.

TheSeketsoana sa silicon carbidee hahiloe ho mamella lipotoloho tse feteletseng tsa mocheso ha e ntse e boloka botsitso ba sebopeho, e netefatsa lipalangoang tse tšepahalang tsa semiconductor nakong ea mekhahlelo e mahlonoko ea tlhahiso ea semiconductor. Ka matla a phahameng a mochine, senasekepe sa mapheoanae fokotsa kotsi ea tšenyo ea li-wafers, e lebisang ho chai e phahameng le boleng bo tsitsitseng ba tlhahiso.

E 'ngoe ea lintlafatso tsa bohlokoa ho Semicera's SiC paddle e ka har'a likhetho tsa eona tsa moralo. E etselitsoe ho fihlela litlhoko tse khethehileng tsa tlhahiso, paddle e fana ka maemo a bonolo ho kopanngoa le lisebelisoa tse fapaneng tsa lisebelisoa, e leng se etsang hore e be tharollo e nepahetseng bakeng sa mekhoa ea morao-rao ea masela. Mohaho o bobebe empa o le matla o thusa ho sebetsana habonolo le ho fokotsa nako ea ts'ebetso, e tlatsetsang ntlafatsong ea tlhahiso ea semiconductor.

Ho phaella ho thepa ea eona ea mocheso le ea mechine, eSeketsoana sa silicon carbidee fana ka khanyetso e ntle ea lik'hemik'hale, e e lumellang hore e sebetse ka mokhoa o ts'epahalang le maemong a thata a lik'hemik'hale. Sena se etsa hore se lokele ho sebelisoa lits'ebetsong tse kenyelletsang etching, deposition, le kalafo ea mocheso o phahameng, moo ho boloka bots'epehi ba seketsoana sa wafer ho leng bohlokoa bakeng sa ho netefatsa liphetho tsa boleng bo holimo.

 

Thepa ea 'mele ea Recrystallized Silicon Carbide

Thepa

Boleng bo Tlwaelehileng

Mocheso oa ho sebetsa (°C)

1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho)

Likahare tsa SiC

99.96%

Free Si content

<0.1%

Boima ba bongata

2.60-2.70 g/cm3

porosity e bonahalang

<16%

Matla a ho hatella

> 600 MPa

Matla a ho kobeha a batang

80-90 MPa (20°C)

Matla a ho kobeha a chesang

90-100 MPa (1400°C)

Katoloso ea mocheso @1500°C

4.70 10-6/°C

Thermal conductivity @1200°C

23 W/m•K

Elastic modulus

240 GPA

Ho hanyetsa mocheso oa mocheso

E ntle haholo

Paddle ea Cantilever (21)
Paddle ea Cantilever (20)
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Semicera Sebaka sa mosebetsi
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Mochini oa lisebelisoa
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Semicera Ware House
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