Semicerae hlahisa boleng ba yona bo hodimoKe Epitaxylits'ebeletso, tse etselitsoeng ho fihlela maemo a nepahetseng a indasteri ea semiconductor ea kajeno. Likarolo tsa silicon tsa Epitaxial li bohlokoa bakeng sa ts'ebetso le ts'epahalo ea lisebelisoa tsa elektroniki, 'me tharollo ea rona ea Si Epitaxy e netefatsa hore likarolo tsa hau li fihlella ts'ebetso e nepahetseng.
Mekhahlelo ea Silicon e Hōlileng ka nepo Semicerao utloisisa hore motheo oa lisebelisoa tse sebetsang hantle o itšetlehile ka boleng ba lisebelisoa tse sebelisoang. Ea ronaKe Epitaxyts'ebetso e laoloa ka hloko ho hlahisa likarolo tsa silicon tse nang le ho tšoana ho ikhethang le botšepehi ba kristale. Likarolo tsena li bohlokoa bakeng sa lits'ebetso ho tloha ho li-microelectronics ho isa lisebelisoa tse tsoetseng pele tsa matla, moo ho ts'epahala le ho ts'epahala ho leng bohlokoa haholo.
E ntlafalitsoe bakeng sa Ts'ebetso ea SesebediswaTheKe EpitaxyLitšebeletso tse fanoang ke Semicera li etselitsoe ho ntlafatsa thepa ea motlakase ea lisebelisoa tsa hau. Ka ho holisa likarolo tsa silicon tse hloekileng haholo tse nang le sekoli se tlase, re etsa bonnete ba hore likarolo tsa hau li sebetsa ka hohle kamoo li ka khonang, ka mokhoa o ntlafetseng oa ho tsamaea le ho fokotsa matla a motlakase. Ntlafatso ena e bohlokoa bakeng sa ho fihlela litšoaneleho tsa lebelo le holimo le tse phahameng tse hlokoang ke theknoloji ea sejoale-joale.
Mefuta-futa ea Likopo Semicera'sKe Epitaxye loketse mefuta e mengata ea likopo, ho kenyeletsoa tlhahiso ea li-transistors tsa CMOS, li-MOSFET tsa matla, le li-transistors tsa bipolar junction. Mokhoa oa rona oa ho feto-fetoha o lumella ho itlhophisa ho ipapisitse le litlhoko tse ikhethileng tsa projeke ea hau, hore na o hloka likarolo tse tšesaane bakeng sa lits'ebetso tsa maqhubu a holimo kapa likarolo tse teteaneng bakeng sa lisebelisoa tsa motlakase.
Boleng bo Phahameng ba LinthoBoleng bo bohareng ba tsohle tseo re li etsang Semicera. Ea ronaKe Epitaxyts'ebetso e sebelisa lisebelisoa tsa morao-rao le mekhoa ea ho etsa bonnete ba hore lera le leng le le leng la silicon le kopana le litekanyetso tse phahameng ka ho fetisisa tsa bohloeki le botšepehi ba sebopeho. Tlhokomelo ena ea lintlha e fokotsa ho hlaha ha bokooa bo ka amang ts'ebetso ea sesebelisoa, ho fella ka likarolo tse tšepahalang le tse tšoarellang nako e telele.
Boitlamo ho Boqapi Semicerae ikemiselitse ho lula ka pele ho theknoloji ea semiconductor. Ea ronaKe Epitaxylits'ebeletso li bonts'a boitlamo bona, bo kenyelletsang tsoelo-pele ea morao-rao mekhoeng ea kholo ea epitaxial. Re lula re ntlafatsa lits'ebetso tsa rona ho fana ka likarolo tsa silicon tse fihlelang litlhoko tse tsoelang pele tsa indasteri, ho netefatsa hore lihlahisoa tsa hau li lula li le tlholisano 'marakeng.
Tailored Tharollo bakeng sa Litlhoko tsa HaoHo utloisisa hore morero o mong le o mong o ikhethile,Semicerae fana ka customizedKe Epitaxylitharollo tse lumellanang le litlhoko tsa hau tse ikhethileng. Hore na o hloka liprofaele tse itseng tsa doping, botenya ba lera, kapa liphetho tsa bokaholimo, sehlopha sa rona se sebetsa haufi-ufi le uena ho fana ka sehlahisoa se lumellanang le litlhaloso tsa hau tse nepahetseng.
| Lintho | Tlhahiso | Patlisiso | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Phoso ea ho shebana le bokaholimo | <11-20>4±0.15° | ||
| Litekanyetso tsa Motlakase | |||
| Dopant | n-mofuta oa Nitrojene | ||
| Ho hanyetsa | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Diameter | 150.0±0.2mm | ||
| Botenya | 350±25 μm | ||
| Boemo ba mantlha bo bataletseng | [1-100]±5° | ||
| Bolelele ba pele bo bataletseng | 47.5±1.5mm | ||
| Folete ea bobeli | Ha ho letho | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Inamela | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Sebopeho | |||
| Boima ba micropipe | <1 e/cm2 | <10 e/cm2 | <15 e/cm2 |
| Litšila tsa tšepe | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Boleng ba Pele | |||
| Pele | Si | ||
| Qetello ea bokaholimo | Si-face CMP | ||
| Likaroloana | ≤60ea/wafer (boholo ≥0.3μm) | NA | |
| Mengwapo | ≤5ea/mm. Bolelele ba kakaretso ≤Diameter | Bolelele bo akaretsang≤2*Diameter | NA |
| Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso | Ha ho letho | NA | |
| Li-edge chips/indents/fracture/hex plates | Ha ho letho | ||
| Libaka tsa polytype | Ha ho letho | Kakaretso≤20% | Kakaretso≤30% |
| Ho tšoaea ka laser ka pele | Ha ho letho | ||
| Boleng ba Morao | |||
| Qetello ea morao | C-sefahleho sa CMP | ||
| Mengwapo | ≤5ea/mm, bolelele bo akaretsang≤2* bophara | NA | |
| Litšitiso tse ka morao (li-chips / indents) | Ha ho letho | ||
| Bokhopo ba mokokotlo | Ra≤0.2nm (5μm*5μm) | ||
| Ho tšoaea ka morao laser | 1 mm (ho tloha pheletsong e ka holimo) | ||
| Qetello | |||
| Qetello | Chamfer | ||
| Sephutheloana | |||
| Sephutheloana | Epi e loketse ho paka ka vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata | ||
| *Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD. | |||
