Silicon Carbide Epitaxy

Tlhaloso e Khutšoanyane:

Silicon Carbide Epitaxy- Likarolo tsa boleng bo holimo tsa epitaxial tse etselitsoeng lits'ebetso tse tsoetseng pele tsa semiconductor, tse fanang ka ts'ebetso e phahameng le ts'epahalo ea lisebelisoa tsa elektronike tsa matla le lisebelisoa tsa optoelectronic.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Lisosa tsa SemiceraSilicon Carbide Epitaxye etselitsoe ho fihlela litlhoko tse matla tsa ts'ebeliso ea semiconductor ea sejoale-joale. Ka ho sebelisa mekhoa e tsoetseng pele ea ho holisa epitaxial, re etsa bonnete ba hore lesela le leng le le leng la silicon carbide le bonts'a boleng bo ikhethang ba kristale, ho ts'oana, le bofokoli bo fokolang. Litšobotsi tsena li bohlokoa bakeng sa ho theha lisebelisoa tsa elektronike tse sebetsang hantle, moo ts'ebetso le taolo ea mocheso e leng tsa bohlokoa.

TheSilicon Carbide EpitaxyTs'ebetso ho Semicera e ntlafalitsoe ho hlahisa likarolo tsa epitaxial tse nang le botenya bo nepahetseng le taolo ea doping, ho netefatsa ts'ebetso e ts'oanang ho lisebelisoa tse fapaneng. Boemo bona ba ho nepahala ke ba bohlokoa bakeng sa lits'ebetso tsa likoloi tsa motlakase, lits'ebetso tsa matla a tsosolositsoeng, le likhokahano tsa maqhubu a holimo, moo ho ts'eptjoang le ho sebetsa hantle ho leng bohlokoa.

Ho feta moo, Semicera'sSilicon Carbide Epitaxye fana ka conductivity e ntlafalitsoeng ea mocheso le motlakase o phahameng oa ho senyeha, e leng se etsang hore e be khetho e ratoang bakeng sa lisebelisoa tse sebetsang tlas'a maemo a feteletseng. Thepa ena e kenya letsoho bophelong ba nako e telele ea lisebelisoa le ho ntlafatsa ts'ebetso e akaretsang ea sistimi, haholo tikolohong e nang le matla a holimo le mocheso o phahameng.

Semicera e boetse e fana ka likhetho tsa ho itlhophisa bakeng saSilicon Carbide Epitaxy, ho lumella litharollo tse ikhethileng tse fihlelang litlhoko tse ikhethileng tsa sesebelisoa. Ebang ke bakeng sa lipatlisiso kapa tlhahiso e kholo, likarolo tsa rona tsa epitaxial li etselitsoe ho tšehetsa moloko o latelang oa mekhoa e mecha ea semiconductor, e leng ho nolofalletsang ho nts'etsopele ea lisebelisoa tsa elektronike tse matla, tse sebetsang hantle le tse ka tšeptjoang.

Ka ho kopanya theknoloji ea morao-rao le mekhoa e thata ea ho laola boleng, Semicera e tiisa hore ronaSilicon Carbide Epitaxylihlahisoa ha li kopane feela empa li feta maemo a indasteri. Boitlamo bona ba bokhabane bo etsa hore likarolo tsa rona tsa epitaxial e be motheo o nepahetseng bakeng sa lits'ebetso tse tsoetseng pele tsa semiconductor, tse bulang tsela bakeng sa katleho ea matla a elektroniki le optoelectronics.

Lintho

Tlhahiso

Patlisiso

Dummy

Crystal Parameters

Polytype

4H

Phoso ea ho shebana le bokaholimo

<11-20>4±0.15°

Litekanyetso tsa Motlakase

Dopant

n-mofuta oa Nitrojene

Ho hanyetsa

0.015-0.025ohm · cm

Mechanical Parameters

Diameter

150.0±0.2mm

Botenya

350±25 μm

Boemo ba mantlha bo bataletseng

[1-100]±5°

Bolelele ba pele bo bataletseng

47.5±1.5mm

Folete ea bobeli

Ha ho letho

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Inamela

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Sebopeho

Boima ba micropipe

<1 e/cm2

<10 e/cm2

<15 e/cm2

Litšila tsa tšepe

≤5E10atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Boleng ba Pele

Pele

Si

Qetello ea bokaholimo

Si-face CMP

Likaroloana

≤60ea/wafer (boholo ≥0.3μm)

NA

Mengwapo

≤5ea/mm. Bolelele ba kakaretso ≤Diameter

Bolelele bo akaretsang≤2*Diameter

NA

Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso

Ha ho letho

NA

Li-edge chips/indents/fracture/hex plates

Ha ho letho

Libaka tsa polytype

Ha ho letho

Kakaretso≤20%

Kakaretso≤30%

Ho tšoaea ka laser ka pele

Ha ho letho

Boleng ba Morao

Qetello ea morao

C-sefahleho sa CMP

Mengwapo

≤5ea/mm, bolelele bo akaretsang≤2* bophara

NA

Litšitiso tse ka morao (li-chips / indents)

Ha ho letho

Bokhopo ba mokokotlo

Ra≤0.2nm (5μm*5μm)

Ho tšoaea ka morao laser

1 mm (ho tloha pheletsong e ka holimo)

Qetello

Qetello

Chamfer

Sephutheloana

Sephutheloana

Epi e loketse ho paka ka vacuum

Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata

*Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD.

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Li-wafers tsa SiC

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