Lisosa tsa SemiceraSilicon Carbide Epitaxye etselitsoe ho fihlela litlhoko tse matla tsa ts'ebeliso ea semiconductor ea sejoale-joale. Ka ho sebelisa mekhoa e tsoetseng pele ea ho holisa epitaxial, re etsa bonnete ba hore lesela le leng le le leng la silicon carbide le bonts'a boleng bo ikhethang ba kristale, ho ts'oana, le bofokoli bo fokolang. Litšobotsi tsena li bohlokoa bakeng sa ho theha lisebelisoa tsa elektronike tse sebetsang hantle, moo ts'ebetso le taolo ea mocheso e leng tsa bohlokoa.
TheSilicon Carbide EpitaxyTs'ebetso ho Semicera e ntlafalitsoe ho hlahisa likarolo tsa epitaxial tse nang le botenya bo nepahetseng le taolo ea doping, ho netefatsa ts'ebetso e ts'oanang ho lisebelisoa tse fapaneng. Boemo bona ba ho nepahala ke ba bohlokoa bakeng sa lits'ebetso tsa likoloi tsa motlakase, lits'ebetso tsa matla a tsosolositsoeng, le likhokahano tsa maqhubu a holimo, moo ho ts'eptjoang le ho sebetsa hantle ho leng bohlokoa.
Ho feta moo, Semicera'sSilicon Carbide Epitaxye fana ka conductivity e ntlafalitsoeng ea mocheso le motlakase o phahameng oa ho senyeha, e leng se etsang hore e be khetho e ratoang bakeng sa lisebelisoa tse sebetsang tlas'a maemo a feteletseng. Thepa ena e kenya letsoho bophelong ba nako e telele ea lisebelisoa le ho ntlafatsa ts'ebetso e akaretsang ea sistimi, haholo tikolohong e nang le matla a holimo le mocheso o phahameng.
Semicera e boetse e fana ka likhetho tsa ho itlhophisa bakeng saSilicon Carbide Epitaxy, ho lumella litharollo tse ikhethileng tse fihlelang litlhoko tse ikhethileng tsa sesebelisoa. Ebang ke bakeng sa lipatlisiso kapa tlhahiso e kholo, likarolo tsa rona tsa epitaxial li etselitsoe ho tšehetsa moloko o latelang oa mekhoa e mecha ea semiconductor, e leng ho nolofalletsang ho nts'etsopele ea lisebelisoa tsa elektronike tse matla, tse sebetsang hantle le tse ka tšeptjoang.
Ka ho kopanya theknoloji ea morao-rao le mekhoa e thata ea ho laola boleng, Semicera e tiisa hore ronaSilicon Carbide Epitaxylihlahisoa ha li kopane feela empa li feta maemo a indasteri. Boitlamo bona ba bokhabane bo etsa hore likarolo tsa rona tsa epitaxial e be motheo o nepahetseng bakeng sa lits'ebetso tse tsoetseng pele tsa semiconductor, tse bulang tsela bakeng sa katleho ea matla a elektroniki le optoelectronics.
| Lintho | Tlhahiso | Patlisiso | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Phoso ea ho shebana le bokaholimo | <11-20>4±0.15° | ||
| Litekanyetso tsa Motlakase | |||
| Dopant | n-mofuta oa Nitrojene | ||
| Ho hanyetsa | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Diameter | 150.0±0.2mm | ||
| Botenya | 350±25 μm | ||
| Boemo ba mantlha bo bataletseng | [1-100]±5° | ||
| Bolelele ba pele bo bataletseng | 47.5±1.5mm | ||
| Folete ea bobeli | Ha ho letho | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Inamela | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Sebopeho | |||
| Boima ba micropipe | <1 e/cm2 | <10 e/cm2 | <15 e/cm2 |
| Litšila tsa tšepe | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Boleng ba Pele | |||
| Pele | Si | ||
| Qetello ea bokaholimo | Si-face CMP | ||
| Likaroloana | ≤60ea/wafer (boholo ≥0.3μm) | NA | |
| Mengwapo | ≤5ea/mm. Bolelele ba kakaretso ≤Diameter | Bolelele bo akaretsang≤2*Diameter | NA |
| Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso | Ha ho letho | NA | |
| Li-edge chips/indents/fracture/hex plates | Ha ho letho | ||
| Libaka tsa polytype | Ha ho letho | Kakaretso≤20% | Kakaretso≤30% |
| Ho tšoaea ka laser ka pele | Ha ho letho | ||
| Boleng ba Morao | |||
| Qetello ea morao | C-sefahleho sa CMP | ||
| Mengwapo | ≤5ea/mm, bolelele bo akaretsang≤2* bophara | NA | |
| Litšitiso tse ka morao (li-chips / indents) | Ha ho letho | ||
| Bokhopo ba mokokotlo | Ra≤0.2nm (5μm*5μm) | ||
| Ho tšoaea ka morao laser | 1 mm (ho tloha pheletsong e ka holimo) | ||
| Qetello | |||
| Qetello | Chamfer | ||
| Sephutheloana | |||
| Sephutheloana | Epi-reading ka sephutheloana sa vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata | ||
| *Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD. | |||
