Li-wafers tsa SOI

Tlhaloso e Khutšoanyane:

Sephaphatha sa SOI ke sebopeho se kang sandwich se nang le likarolo tse tharo; Ho kenyeletsoa lera holimo (sesebediswa lera), bohareng ba patoa oksijene lera (bakeng sa insulating SiO2 lera) le substrate tlase (ka bongata silicon). Li-wafers tsa SOI li hlahisoa ka mokhoa oa SIMOX le thekenoloji ea li-wafer bonding, e lumellang hore ho be le likarolo tse fokolang le tse nepahetseng tsa lisebelisoa, botenya bo lekanang le bofokoli bo tlaase.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

SOI Wafers(1)

Sebaka sa kopo

1. Potoloho e kopantsoeng ka lebelo le phahameng

2. Lisebelisoa tsa Microwave

3. Mocheso o phahameng oa potoloho o kopantsoeng

4. Lisebelisoa tsa matla

5. Potoloho e kopantsoeng ea matla a tlaase

6. MEMS

7. Motlakase o tlaase oa potoloho o kopantsoeng

Ntho

Khang

Ka kakaretso

Wafer Diameter
晶圆尺寸(mm)

50/75/100/125/150/200mm±25um

Seqha/Serope
翘曲度(

<10um

Likaroloana
颗粒度(

0.3um <30ea

Flats/Notch
定位边/定位槽

Flat kapa Notch

Kenyelletso ea Edge
边缘去除(mm)

/

Sesebelisoa sa Sesebelisoa
器件层

Mofuta oa Lera la Sesebelisoa / Dopant
器件层掺杂类型

Mofuta oa N/P-Mofuta
B/ P/ Sb / Joalo ka

Sesebediswa-lera Orientation
器件层晶向

<1-0-0> / <1-1-1> / <1-1-0>

Sesebediswa-lera Botenya
器件层厚度(um)

0.1 ~ 300um

Sesebediswa-lera Resistivity
器件层电阻率(ohm•cm)

0.001 ~ 100,000 ohm-cm

Lisebelisoa tsa lera la lisebelisoa
器件层颗粒度(

<30ea@0.3

Sesebelisoa sa Layer TTV
器件层TTV(

<10um

Sesebediswa Layer Qetella
器件层表面处理

E bentšitsoe

LEKOBE

Thermal Oxide Teckness
埋氧层厚度(um)

50nm(500Å)~15um

Tšoara Lera
衬底

Tšoara mofuta oa Wafer / Dopant
衬底层类型

Mofuta oa N/P-Mofuta
B/ P/ Sb / Joalo ka

Tšoara Wafer Orientation
衬底晶向

<1-0-0> / <1-1-1> / <1-1-0>

Tšoara Wafer Resistivity
衬底电阻率(ohm•cm)

0.001 ~ 100,000 ohm-cm

Tšoara Botenya ba Wafer
衬底厚度(um)

> 100um

Tšoara Wafer Qetella
衬底表面处理

E bentšitsoe

Li-wafers tsa SOI tsa litlhaloso tsa sepheo li ka etsoa ho latela litlhoko tsa bareki.

Semicera Sebaka sa mosebetsi Sebaka sa mosebetsi sa Semicera 2

Mochini oa lisebelisoaTs'ebetso ea CNN, ho hloekisa lik'hemik'hale, ho roala CVD

Tshebeletso ya rona


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