Sebaka sa kopo
1. Potoloho e kopantsoeng ka lebelo le phahameng
2. Lisebelisoa tsa Microwave
3. Mocheso o phahameng oa potoloho o kopantsoeng
4. Lisebelisoa tsa matla
5. Potoloho e kopantsoeng ea matla a tlaase
6. MEMS
7. Motlakase o tlaase oa potoloho o kopantsoeng
Ntho | Khang | |
Ka kakaretso | Wafer Diameter | 50/75/100/125/150/200mm±25um |
Seqha/Serope | <10um | |
Likaroloana | 0.3um <30ea | |
Flats/Notch | Flat kapa Notch | |
Kenyelletso ea Edge | / | |
Sesebelisoa sa Sesebelisoa | Mofuta oa Lera la Sesebelisoa / Dopant | Mofuta oa N/P-Mofuta |
Sesebediswa-lera Orientation | <1-0-0> / <1-1-1> / <1-1-0> | |
Sesebediswa-lera Botenya | 0.1 ~ 300um | |
Sesebediswa-lera Resistivity | 0.001 ~ 100,000 ohm-cm | |
Lisebelisoa tsa lera la lisebelisoa | <30ea@0.3 | |
Sesebelisoa sa Layer TTV | <10um | |
Sesebediswa Layer Qetella | E bentšitsoe | |
LEKOBE | Thermal Oxide Teckness | 50nm(500Å)~15um |
Tšoara Lera | Tšoara mofuta oa Wafer / Dopant | Mofuta oa N/P-Mofuta |
Tšoara Wafer Orientation | <1-0-0> / <1-1-1> / <1-1-0> | |
Tšoara Wafer Resistivity | 0.001 ~ 100,000 ohm-cm | |
Tšoara Botenya ba Wafer | > 100um | |
Tšoara Wafer Qetella | E bentšitsoe | |
Li-wafers tsa SOI tsa litlhaloso tsa sepheo li ka etsoa ho latela litlhoko tsa bareki. |