Semicerae thabela ho fana2" Gallium oxide Substrates, thepa ea morao-rao e etselitsoeng ho ntlafatsa ts'ebetso ea lisebelisoa tse tsoetseng pele tsa semiconductor. Li-substrates tsena, tse entsoeng ka Gallium Oxide (Ga2O3), e na le bandgap e pharalletseng haholo, e e etsang khetho e nepahetseng bakeng sa ts'ebeliso ea matla a holimo, a maqhubu a holimo le a UV Optoelectronic.
Likarolo tsa Bohlokoa:
• Ultra-Wide Bandgap: The2" Gallium oxide Substratesfana ka sehlopha se hlaheletseng sa hoo e ka bang 4.8 eV, se lumellang hore ho be le motlakase o phahameng le mocheso o sebetsang, o fetang hōle bokhoni ba lisebelisoa tsa setso tsa semiconductor tse kang silicon.
•Voltage e ikhethang ea ho senya: Li-substrates tsena li thusa lisebelisoa ho sebetsana le li-voltage tse phahameng haholo, li etsa hore e be tse loketseng lisebelisoa tsa elektronike, haholo-holo lits'ebetsong tse nang le matla a phahameng.
•E babatsehang Thermal Conductivity: Ka botsitso bo phahameng ba mocheso, li-substrates tsena li boloka ts'ebetso e tsitsitseng esita le libakeng tsa mocheso o feteletseng, tse loketseng bakeng sa lisebelisoa tse matla le tse phahameng tsa mocheso.
•Boitsebiso ba Boemo bo Phahameng: The2" Gallium oxide Substratesfana ka sekoli se tlase le boleng bo phahameng ba kristale, ho netefatsa ts'ebetso e tšepahalang le e sebetsang ea lisebelisoa tsa hau tsa semiconductor.
•Lisebelisoa tse fapaneng: Li-substrates tsena li loketse mefuta e mengata ea lits'ebetso, ho kenyeletsoa li-transistors tsa matla, Schottky diode, le lisebelisoa tsa UV-C tsa LED, tse fanang ka motheo o tiileng bakeng sa mekhoa e mecha ea matla le ea optoelectronic.
Notlolla bokhoni bo felletseng ba lisebelisoa tsa hau tsa semiconductor ka Semicera's2" Gallium oxide Substrates. Li-substrates tsa rona li etselitsoe ho fihlela litlhoko tse hlokahalang tsa lits'ebetso tse tsoetseng pele tsa kajeno, ho netefatsa ts'ebetso e phahameng, ts'epahalo le ts'ebetso e ntle. Khetha Semicera bakeng sa lisebelisoa tsa morao-rao tsa semiconductor tse tsamaisang boqapi.
| Lintho | Tlhahiso | Patlisiso | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Phoso ea ho shebana le bokaholimo | <11-20>4±0.15° | ||
| Litekanyetso tsa Motlakase | |||
| Dopant | n-mofuta oa Nitrojene | ||
| Ho hanyetsa | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Diameter | 150.0±0.2mm | ||
| Botenya | 350±25 μm | ||
| Boemo ba mantlha bo bataletseng | [1-100]±5° | ||
| Bolelele ba pele bo bataletseng | 47.5±1.5mm | ||
| Folete ea bobeli | Ha ho letho | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Inamela | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Sebopeho | |||
| Boima ba micropipe | <1 e/cm2 | <10 e/cm2 | <15 e/cm2 |
| Litšila tsa tšepe | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Boleng ba Pele | |||
| Pele | Si | ||
| Qetello ea bokaholimo | Si-face CMP | ||
| Likaroloana | ≤60ea/wafer (boholo ≥0.3μm) | NA | |
| Mengwapo | ≤5ea/mm. Bolelele ba kakaretso ≤Diameter | Bolelele bo akaretsang≤2*Diameter | NA |
| Lekhapetla la lamunu/makoti/matheba/maphatso/mapetso/tshilafatso | Ha ho letho | NA | |
| Li-edge chips/indents/fracture/hex plates | Ha ho letho | ||
| Libaka tsa polytype | Ha ho letho | Kakaretso≤20% | Kakaretso≤30% |
| Ho tšoaea ka laser ka pele | Ha ho letho | ||
| Boleng ba Morao | |||
| Qetello ea morao | C-sefahleho sa CMP | ||
| Mengwapo | ≤5ea/mm, bolelele bo akaretsang≤2* bophara | NA | |
| Litšitiso tse ka morao (li-chips / indents) | Ha ho letho | ||
| Bokhopo ba mokokotlo | Ra≤0.2nm (5μm*5μm) | ||
| Ho tšoaea ka morao laser | 1 mm (ho tloha pheletsong e ka holimo) | ||
| Qetello | |||
| Qetello | Chamfer | ||
| Sephutheloana | |||
| Sephutheloana | Epi e loketse ho paka ka vacuum Sephutheloana sa lik'hasete tse nang le liphaephe tse ngata | ||
| *Lintlha: "NA" e bolela hore ha ho na kopo Lintho tse sa boleloang li ka lebisa ho SEMI-STD. | |||
