SiC cantilever paddle silicon carbide diffusion paddle

Tlhaloso e Khutšoanyane:

Silicon carbide paddle, e tsejoang hape e le silicon carbide cantilever paddle, silicon carbide cantilever beam ke mofuta oa lihlahisoa tsa silicon carbide ceramic kamora 1850 ℃ mocheso o phahameng oa sintering, empa mocheso o phahameng oa sintering silicon carbide ceramic ke lihlahisoa tse khethehileng tsa ceramic, ka likaroloana tse ntle tsa α-SiC. le li-additives li hatelloa ka sekheo, li kopane le silicon ea metsi ka mocheso o phahameng, k'habone e se nang letho le ho kenella ha Si reaction, ho thehoa ha β-SiC, 'Me ho kopantsoe le α-SiC, silicon e sa lefelloeng e ile ea tlatsa porosity, e le ho fumana lisebelisoa tse phahameng tsa ceramic; E na le litšobotsi tse fapaneng tse phahameng tsa li-ceramic tsa indasteri.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Lisosa tsa SemiceraLi-paddles tsa SiCli entsoe bakeng sa katoloso e fokolang ea mocheso, ho fana ka botsitso le ho nepahala lits'ebetsong moo ho nepahala ha dimensional ho leng bohlokoa. Sena se etsa hore e be tse loketseng bakeng sa lits'ebetso mooliphaphathali kenngoa ka makhetlo a mangata a ho futhumatsa le ho pholile, kaha seketsoana sa wafer se boloka botšepehi ba sona, ho netefatsa ts'ebetso e tsitsitseng.

Ho kenyelletsa Semicera'ssilicon carbide diffusion paddlesmoleng oa hau oa tlhahiso e tla ntlafatsa ts'epo ea ts'ebetso ea hau, ka lebaka la thepa ea bona e phahameng ea mocheso le lik'hemik'hale. Li-paddles tsena li nepahetse bakeng sa ts'ebetso ea phallo, oxidation le annealing, ho netefatsa hore li-wafers li tšoaroa ka hloko le ka nepo mohatong o mong le o mong.

Boqapi bo bohareng ba Semicera'sSekepe sa SiCmoralo. Li-paddles tsena li etselitsoe hore li lekane hantle ka har'a lisebelisoa tse teng tsa semiconductor, li fana ka ts'ebetso e ntlafalitsoeng ea ho sebetsana le eona. Sebopeho se bobebe le moralo oa ergonomic ha o ntlafatse feela lipalangoang tsa liphaephe empa hape o fokotsa nako ea ts'ebetso, e bakang tlhahiso e ntlafalitsoeng.

 

Thepa ea 'mele ea Recrystallized Silicon Carbide

Thepa

Boleng bo Tlwaelehileng

Mocheso oa ho sebetsa (°C)

1600°C (ka oksijene), 1700°C (ho fokotsa tikoloho)

Likahare tsa SiC

99.96%

Free Si content

<0.1%

Boima ba bongata

2.60-2.70 g/cm3

porosity e bonahalang

<16%

Matla a ho hatella

> 600 MPa

Matla a ho kobeha a batang

80-90 MPa (20°C)

Matla a ho kobeha a chesang

90-100 MPa (1400°C)

Katoloso ea mocheso @1500°C

4.70 10-6/°C

Thermal conductivity @1200°C

23 W/m•K

Elastic modulus

240 GPA

Ho hanyetsa mocheso oa mocheso

E ntle haholo

Paddle ea Cantilever (3)
Paddle ea Cantilever (21)
fd658ca43ee41331d035aad94b7a9cc
Semicera Sebaka sa mosebetsi
Sebaka sa mosebetsi sa Semicera 2
Mochini oa lisebelisoa
Ts'ebetso ea CNN, ho hloekisa lik'hemik'hale, ho roala CVD
Semicera Ware House
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